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Positive photo resist

4. K-PRO Photoresist for Packaging Applications
ㆍ  Positive photo resist for packaging applications
ㆍ  High sensitivity and throughput
ㆍ  Thickness: 1 μm - 25 μm (50 μm double coat)
Exposure: i-Line, g-Line and broadband
ㆍ  저렴한 가격. 0.5 L, 1 L, 4 L 이외 용량 선택 가능
ㆍ  납기일: 3~5주 (평균 납기일: 24일, 2018년 납품 기준)
K-PRO Photoresist for Packaging Applications
K-PRO
Description
Properties
 - K-PRO is a positive photoresist for use in i-Line, g-Line and broadband packaging applications.
 - Designed for plating, bumping, TSV, and other metal deposition processes.
 - Excellent substrate adhesion for wet etch applications.
 - Compatible with most plating metals and offer high sensitivity, steep wall profiles, high aspect ratios, increased heat resistance,
  and excellent process latitude. 		 - Advanced packaging positive photoresist.
 - Cover 1 – 25 microns in a single coat.
 - 50 microns in double coat is possible.
 - Designed for use with industry standard KOH, TMAH and potassium borate developers.
  - No PEB necessary.

K-PRO 1, 2 and 3 Spin Curve
 
K-PRO 5, 7 and 15 Spin Curve
K-PRO 1, 2 and 3 Spin Curve
K-PRO 5, 7 and 15 Spin Curve

K-PRO Absorbance
 
K-PRO Optical Parameters
K-PRO Absorbance
K-PRO Optical Parameters

Process Guidelines
ProductFilm Thickness (μm)Soft Bake Rehydration Time Broadband Aligner Exposure
K-PRO 11115 °C for 2 min3 minutes65 mJ/cm2
K-PRO 22115 °C for 2 min3 minutes72 mJ/cm2
K-PRO 33115 °C for 2 min3 minutes76 mJ/cm2
K-PRO 54115 °C for 2.5 min5 minutes80 mJ/cm2
K-PRO 77115 °C for 3 min15 minutes125 mJ/cm2
K-PRO 1515
25		115 °C for 4 min
115 °C for 5.5 min		30 minutes
30 minutes		210 mJ/cm2
380 mJ/cm2
K-PRO 15 (Double Coat)50110 °C for 6 min
115 °C for 8 min		30 minutes800 mJ/cm2

Process results
KL_P4800_FT10.jpg
Copper: Photoresist strip - 10 μm Cu Post on Cu substrate
KL_P4800_FT15.jpg
Copper: Plated Cu on Cu substrateFilm Thickness 15 μm: 10 μm line/space 1:1
KL_P4800_TF25.jpg
Silicon:
Film Thickness 25 μm: 15 μm line/space
Copper_Plating_Application_5um_Cu_Posts_230x120.jpg
Copper Plating Applications: 5 μm Cu Posts
15um_film_7um_sl_230x120.jpg
15 μm film, 7 μm S/L
25um_film_10um_sl_230x120.jpg
25 μm film, 10 μm S/L
Related Products (Guide for Kemlab Positive Photoresists)
Product Suite
Tone / Exposure
Product
Film Thickness (μm)
0.2
0.5
0.8
1
1.3
2
2.5
3
4
5
6
7
8
9
10
20
30
40
50
100
KL 5302 Hi-Res
  Interference Lithography (Link)  		Positive
  i-Line, Broadband, g-line  		KL 5302 Hi-Res                                        
                                       
KL 5300
General Purpose
(Link)		 Positive
i-Line, Broadband, g-line		 KL 5302                                        
KL 5305                                        
KL 5310                                        
KL 5315                                        
KL 6000
General Purpose Thick
(Link)		 Positive
i-Line, Broadband, g-line		 KL 6003                                        
KL 6005                                        
KL 6008                                        
K-PRO
Packaging Resist (Link)		 Positive
i-Line, Broadband, g-line		 K-PRO 1                                        
K-PRO 2                                        
K-PRO 3                                        
K-PRO 5                                        
K-PRO 7                                        
K-PRO 15                                        
Related Products (Guide for Kemlab Neative Photoresists)
Product Suite
Tone / Exposure
Product
Film Thickness (μm)
0.20.50.811.322.534567891020304050100
HARE SQ
Negative Epoxy (Link)		Negative
Epoxy Resist
i-Line, Broadband
MEMS, Microfluidics		SQ 2                    
SQ 5                    
SQ 10                    
SQ 25                    
SQ 50                    
KL Image Reversal
Lift Off (Link)		Positive / Negative
i-Line, Broadband, g-line		KL IR Lift-Off 15                    
KL IR 15                    
APOL-LO 3200
  Negative Lift Off Profle (Link)		Negative undercut profile
i-Line, Broadband		APOL-LO 3202                    
APOL-LO 3204                    
APOL-LO 3207                    
KL NPR
  Vertical Profile (Link)		Negative vertical profile
i-Line and Broadband		KL NPR 1                    
KL NPR 2                    
KL NPR 4                    
KL NPR 6                    
KL NPR 10