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4. HARE SQ OptiCoat - Optical Gragde Negative Epoxy Photoresist

ㆍ	Optical Grade Negative Epoxy Photoresist
ㆍ	Thickness: 1.5 μm - 100 μm
ㆍ	Application: MEMS, Microfluidics, Sensors, Pixel arrays
ㆍ	저렴한 가격. 0.5 L, 1 L, 4 L, 16 L 이외 용량 선택 가능
ㆍ	납기일: 3~5주

HARE SQ OptiCoat - Optical Grade Epoxy Negative Photoresist

HARE SQ OptiCoat

Description	Advantages
HARE SQ™ OptiCoat is an advanced epoxy-based negative photoresist for permanent devices with demanding optical parameters such as waveguides and sensors. HARE SQ™ OptiCoat is an improved version of HARE SQ™. Using patent-pending advanced chemistry, higher transparency can be maintained over a wide temperature range. Film thicknesses of 2 to 100 microns can be achieved with a single spin coat.	- Epoxy resin with superior cleanliness and excellent reproducibility. - Improved optical stability. - Reduced oxidative stress. - Fully compatible with SU-8 processes. Tone: Negative Photoresist Film Thickness: Up to 100 μm single coat Sensitivity: NUV, Broadband, i-line Developer: HARE SQ™ Developer

HARE SQ Optical Grade Comparison 25 um FT, 24 hrs @ 150 C	HARE SQ 25 Optical Grade vs Standard HARE SQ 25 (Oven Testing @ 175 C)

HARE SQ OptiCoat - Spin Speed vs. Film Thickness

Process Guide

Product: Film thickness:	SQ OptiCoat 2 2 μm	SQ OptiCoat 5 5 μm	SQ OptiCoat 10 10 μm	SQ OptiCoat 25 25 μm	SQ OptiCoat 50 50 μm	SQ OptiCoat 50 100 μm
Softbake (2 step)	65 °C for 1 min 95 °C for 1 min	65 °C for 1 min 95 °C for 3 min	65 °C for 2 min 95 °C for 5 min	65 °C for 3 min 95 °C for 7 min	65 °C for 5 min 95 °C for 15 min	65 °C for 10 min 95 °C for 30 min
Expose (broadband) on Si	200 mJ/cm²	180 mJ/cm²	180 mJ/cm²	180 mJ/cm²	180 mJ/cm²	180 mJ/cm²
Post Exposure Bake (2 step)	65 °C for 1 min 95 °C for 1 min	65 °C for 1 min 95 °C for 1 min	65 °C for 1 min 95 °C for 2 min	65 °C for 1 min 95 °C for 3 min	65 °C for 1 min 95 °C for 5 min	65 °C for 2 min 95 °C for 10 min
Develop (immersion)	1 minute	1 minute	2.5 minutes	3.5 minutes	6 minutes	15 minutes