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제품소개

  • Wafer
  • Photo resist
  • E-beam resist
  • Spin coater & Hot plate
  • WETSEM
  • Coming soon

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Home > 제품소개 > Spin coater

Spin coater

3. SC-80R - 1/2~6" Spin coater
ㆍ  Academic 1/2" ~ 8" Spin Coater
ㆍ  Speed: 300 - 8,000 rpm
SC-80R - 1/2~6" Spin coater
 Product Funtion and Feature
 - PP forming shell, anti-acid corrosion.
 - Brushless motor, no diminishing of brush or cause of sparkles.
 - Precision Drive Design, Providing Stable RPM.
 - Japanese made 10W dual cylinder vacuum pump, small and quiet with high efficiency.
 - Digital vacuum pressure switch and display, ensuring motor start operating at the correct vacuum degree.
 - Power: 110V/220V AC, 90W brushless motor.
 - vacuum setting multi-unit options: mmHg, inchHg, torr ... and so on.

Specifications
ModelCoating Pan (cm)Standard Vacuum ChuckRPMDimensions (mm)Suitable Vacuum
Chuck Size
SC-80R+S261"300 ~ 8000W360 x D460 x H3101/2" ~ 6"
SC-80R+M282"W360 x D460 x H3101/2" ~ 6"
SC-80R+L324"W470 x D570 x H3501/2" ~ 8"