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Positive ebeam resist

3. PMMA
ㆍ  Positive e-beam resist
ㆍ  Molecular weights: 950K, 495K, 350K, 120K, 30K and others
Dilutions from 1% up to 18% (depending on molecular weight)
ㆍ  Thickness: 50 nm - 2000 nm
ㆍ  500ml 이상 구매 시 두께별로 250ml 용량 선택 가능
ㆍ  저렴한 가격. 250ml, 500ml, 1L 이외 용량 선택 가능
ㆍ  납기일: 3~5주 (평균 납기일: 21일, 2018년 납품 기준)
PMMA positive e-beam resist
Features
Properties
  - Positive e-beam resist.
  - Molecular Weights: 950K, 495K, 350K,  120K, 35K.
  - Dilution: < 1% up to 18% (depending on molecular weight).
  - 판매 용량: 250 ml to 30 L.
  - Flexible Distribution: 500 ml 이상  두께 별 250 ml로 선택 가능.
      예). 1L 구매 시 아래와 같이 선택 가능.
      1. 950K A2: 250ml x 1bottle.
      2. 495K A7: 250ml x 1bottle.
      3. 120K A10: 500ml x 1bottle.
 Parameter /PMMA A1 to A18
 Thickness (μm) /
 4000 rpm		 50 nm to 2000 nm
 Resolution  value (nm) < 10

Spin Curves
PMMA 950K A2, A4, A6, A7, A8
PMMA 495K A2, A4, A6, A8, A11
PMMA Positive E-beam Reist 950K A2 to A8 Spin Curve
PMMA Positive E-beam Reist 495K A2 to A11 Spin Curve
PMMA 495K A15, A16, A17, A18
PMMA 350K A2, A4, A6, A8
PMMA Positive E-beam Reist 495K A15 to A18 Spin Curve
PMMA Positive E-beam Reist 350K A2 to A8 Spin Curve
PMMA 350K A15, A16, A17, A18
PMMA Positive E-beam Reist 350K A15 to A18 Spin Curve
Products Guide
Tone
Product (link)
Film Thickness (nm)
Feature
Adhesion PromoterSurPass seriesNAApply resist: Novolac, DNQ, PMMA, HSQ, PMGI, SU-8, SML, PI, ...
Negative ebeam resistHSQ series8 – 1,650Dilution: 1 - 45%.
Supply: Powder, Solution.
H-SiQ series25 – 850Dilution: 2 - 20%.
Supply: Powder, Solution.
AR-N 7520 New series100 – 800Best resolution: 28 nm.
e-beam, DUV, i-line.
Positive ebeam resistHARP PMMA series50  – 3,700m/W: 950K, 495K.
Dilution: 2 - 11 %.
HARP-C Copolymer series150  – 1,100MMA/MAA Copolyer.
  Dilution: 6 - 12 %.
PMMA series40  – 7,000m/W: 950K, 495K, 350K, 120K, 35K.
  Dilution: 1 - 18 %.
Copolymer series100  – 1,100Copolymer.
  Dilution: 1 - 13 %.
SML series50  – 4,800High resolution: 5 nm. Aspect ratio: >50:1.
  Slow etch rate.
Conductive layerDisCharge H2O series25 – 170Apply resist: PMMA, HSQ, mr-PosEBR, AR-P 6200, ZEP, SML.
Protective Surface CoatingPSC-10032.4 – 5.3Protective Surface Coating
PSC-IB DPM 101010 (@ 2000 RPM)Protective Surface Coating
* Double coating.