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Negative photo resist

3. HARE SQ MicroCoat - Negative Epoxy Photoresist for Thin Film
ㆍ  Negative Epoxy Photoresist for Thin Film
ㆍ  SU-8 공정과 호환
Thickness: 0.19 μm - 7 μm
ㆍ  Application: MEMS, Microfluidics, Sensors, Pixel arrays
ㆍ  저렴한 가격. 0.5 L, 1 L, 4 L 이외 용량 선택 가능
ㆍ  납기일: 3~5주
HARE-SQ High Aspect Ratio Epoxy Negative Photoresist
Description
Advantages
  HARE SQ™ MicroCoat resists are epoxy-based negative photoresists designed for thin films, high temperatures and severe chemical applications. The HARE SQ™ MicroCoat is designed for use in thin applications ranging from ~ 0.25 - 5 μm, and is recommended for use in permanent device applications. - HARE SQ™ photoresists use an epoxy resin with superior cleanliness and excellent lithographic.
 - Minimal film loss.
 - Fully crosslinked at 0.25 μm.
 - Short bake times for higher throughput.
 - Consistent surface energy of crosslinked resist.

 Tone:             Negative Photoresist
 Film Thickness: ~ 0.25 - 5 μm
 Sensitivity:      Broadband, i-line
 Developer:      HARE SQ™ Developer

HARE SQ MicroCoat Spin Curve Thin
HARE SQ MicroCoat Spin Curve
HARE_SQ_MicroCoat_Spin_Curve_Thin
HARE_SQ_MicroCoat_Spin_Curve.jpg

Process Guide
Product:
Film thickness:		SQ MC 0.25
  0.25 μm		SQ MC 0.5
0.5 μm		SQ MC 1.0
1.0 μm		SQ MC 2.0
2.0 μm		SQ MC 4.0
  4.0 μm
Softbake85 °C for 1 min85 °C for 2 min85 °C for 3 min85 °C for 3 min85 °C for 4 min
Expose (broadband) on Si180 mJ/cm2100 mJ/cm2100 mJ/cm290 mJ/cm270 mJ/cm2
Post Exposure Bake85 °C for 2 min85 °C for 2 min85 °C for 2 min85 °C for 2 min85 °C for 2 min
Develop (immersion)30 seconds30 seconds1 minute1 minute2 minutes

Process results
HARE_SQ_MicroCoat_2_to_4_um_line_and_space_in_0.5_um_film.jpg
2 - 4 μm line/space in 0.5 μm film 1:1
HARE_SQ_MicroCoat_line_and_space.jpg
2 - 3 μm dense line/space in 1 μm film 1:1 by Contact alinger exposure
OPTICAL PARAMETERS
HARE_SQ_MicroCoat_Absorbance_Curve.jpg
2 - 4 μm line/space in 0.5 μm film 1:1
HARE_SQ_MicroCoat_Optical_Transmission.jpg
2 - 3 μm dense line/space in 1 μm film 1:1 by Contact alinger exposure
Related Products (Guide for Kemlab Positive Photoresists)
Product Suite
Tone / Exposure
Product
Film Thickness (μm)
0.2
0.5
0.8
1
1.3
2
2.5
3
4
5
6
7
8
9
10
20
30
40
50
100
KL 5302 Hi-Res
  Interference Lithography (Link)  		Positive
  i-Line, Broadband, g-line  		KL 5302 Hi-Res                    
                    
KL 5300
General Purpose
(Link)		Positive
i-Line, Broadband, g-line		KL 5302                    
KL 5305                    
KL 5310                    
KL 5315                    
KL 6000
General Purpose Thick
(Link)		Positive
i-Line, Broadband, g-line		KL 6003                    
KL 6005                    
KL 6008                    
K-PRO
Packaging Resist (Link)		Positive
i-Line, Broadband, g-line		K-PRO 1                    
K-PRO 2                    
K-PRO 3                    
K-PRO 5                    
K-PRO 7                    
K-PRO 15                    
Related Products (Guide for Kemlab Neative Photoresists)
Product Suite
Tone / Exposure
Product
Film Thickness (μm)
0.2 0.5 0.8 1 1.3 2 2.5 3 4 5 6 7 8 9 10 20 30 40 50 100
HARE SQ
Negative Epoxy (Link)		 Negative
Epoxy Resist
i-Line, Broadband
MEMS, Microfluidics		 SQ 2                                        
SQ 5                                        
SQ 10                                        
SQ 25                                        
SQ 50                                        
KL Image Reversal
Lift Off (Link)		 Positive / Negative
i-Line, Broadband, g-line		 KL IR Lift-Off 15                                        
KL IR 15                                        
APOL-LO 3200
  Negative Lift Off Profle (Link)		 Negative undercut profile
i-Line, Broadband		 APOL-LO 3202                                        
APOL-LO 3204                                        
APOL-LO 3207                                        
KL NPR
  Vertical Profile (Link)		 Negative vertical profile
i-Line and Broadband		 KL NPR 1                                        
KL NPR 2                                        
KL NPR 4                                        
KL NPR 6                                        
KL NPR 10