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제품소개

  • Wafer
  • Photo resist
  • E-beam resist
  • Spin coater & Hot plate
  • WETSEM
  • Coming soon

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Spin coater

3. ASC-100 - 6" Spin coater
ㆍ  Programmable 6" Spin Coater
ㆍ  Speed: 100 - 12,000 rpm
Accuracy: ±1 rpm
ㆍ  Vacuum pump, chuck (1ea) 무상 제공
ㆍ  10 coating recipes and 10 ramps in each recipe
ㆍ  Small size: 359 W x 256 D x 258 H mm
ASC-100 - 6" Spin Coater
Product Features
7" Touch Screen
 - Programmable Soin Coater.
 - Speed: 100 - 12,000 rpm (Accuracy: ±1 rpm).
 - Vacuum pump, chuck (1ea) 무상 제공.
 - Sample size: < 6".
 - 10 coating recipes and 10 ramps in each recipe.
 - HDPE coating chamber.
 - Vacuum and door safety interlock.
 - Small size: 359 W x 256 D x 258 H mm.
ASC-100 Programmable Spin Coater 7 inch touch screen

Specifications
Model RPM
 Adj.		 RPM
  Range		 Acceleration Recipe No. Ramps for recipe Drain Sample size Dimensions (mm)
ASC-80 1 200 - 10000 100 - 10000 5 5 N/A < 4" 210 x 250 x 200
ASC-100 100 - 12000 100 - 30000 10 10 16 mm < 6" 359 x 256 x 258
ASC-200 20 - 10000 0 - 50000 100 100 16 mm < 8" 433 x 306 x 306
ASC-300 0 - 5000 0 - 10000 100 100 16 mm < 12" 613 x 463 x 306