Photo & e-beam resist

7. KL NPR - Vertical Profile Photo Resist
  •  
    Negative photo resist with Vertical profile
     
    Thickness: about 1 μm - 20 μm
    Exposure: i-line and broadband
     
    저렴한 가격. 0.5 L, 1 L, 4 L 이외 용량 선택 가능
     
    납기일: 3~5주
KL NPR - Vertical Profile Negative Photo Resist ▼
Description
Properties
 - KL NPR is a negative tone, novolac photoresist designed for
  eletroplating, metal deposition, TSV, and RIE etch.
 - Vertical Profile and high aspect ratios.
 - Thick vertical porfile (straight wall).
 - Film Thickness range 1 – 20 μm.
 - Designed for use with industry standard TMAH, KOH developers.
 - A possible customizing to thickness.

Processing Guidelines
           
NPR 1
  (FT: 1 μm)		NPR 2
  (FT: 2 μm)		NPR 4
  (FT: 4 μm)		NPR 6
  (FT: 6 μm)		NPR 10
  (FT: 10 μm)
Spin coat45 sec
@ 2000 RPM		45 sec
@ 2000 RPM		45 sec
@ 2000 RPM		45 sec
@ 2000 RPM		45 sec
@ 2000 RPM
Soft bake90 sec
@ 110 ⁰C		90 sec
@ 110 ⁰C		90 sec
@ 110 ⁰C		90 sec
@ 110 ⁰C		120 sec
@ 110 ⁰C
Exposure
(Broadband
on Si)		45 mJ/cm250 mJ/cm265 mJ/cm270 mJ/cm275 mJ/cm2
PEB90 sec
@ 110 ⁰C		90 sec
@ 110 ⁰C		90 sec
@ 110 ⁰C		90 sec
@ 110 ⁰C		120 sec
@ 110 ⁰C
Development
(0.26N TMAH)		15 - 30 sec30 sec45 sec60 sec90 sec

KL NPR Spin Curve
KL NPR Optical Parameters
KL NPR Negative Photo Resist with Vertical Profiles Spin curve.
KL NPR Negative Photo Resist with Vertical Profiles Optical Parameters.

Process results
10um posts in 25um film thickness
10 μm posts in 25 μm film thickness
15um line and space in 25um film thickness
15 μm line and space in 25 μm film thickness
5um post on Si substrate
5 μm posts on Si substrate
7um line and space on Cu substrate
7 μm line and space on Cu substrate
Products Guide ▼
Tone
Product (link)
Film Thickness (µm)
Feature
Adhesion Promoter SurPass NA Apply resist: Novolac, DNQ, PMMA, HSQ, PMGI, SU-8, SML, PI, ...
Negative HARE SQ series 2 – 100 and 200* Epoxy.
SQ QuickDry series 2 – 200 Epoxy, Quick drying solvent.
SQ MicroCoat series 0.05 – 2 Epoxy, Thin film, Surface protection.
SQ OptiCoat series 2 – 100 Epoxy, Higher transparency.
APOL-LO 3200 series 2 – 10+ Lift-off profile.
KL NPR series 1 – 20 Vertical profile.
Image Reversal KL IR 15,
KL IR Lift-Off 15		 1.2 – 2.6 Lift-off profile (negative),
Vertical profile (negative).
Positive KL 7000 series 0.15 – 3 High resolution, No PFAS and Fluorine.
KL 6000 series 2.5 – 11 General thick purpose.
K-PRO series 0.8 – 25 and 50* Plating and etch application.
Advanced packaging
Protective Surface Coating PSC-1003 2.4 – 5.3 Protective Surface Coating
PSC-IB DPM 1010 10 (@ 2000 RPM) Protective Surface Coating
* Double coating.