| 3. PMMA |
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- Positive e-beam resist
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- Molecular weights: 950K, 495K, 350K, 120K, 30K and others
Dilutions from 1% up to 18% (depending on molecular weight)
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- Thickness: 50 nm - 2000 nm
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- 500ml 이상 구매 시 두께별로 250ml 용량 선택 가능
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- 저렴한 가격. 250ml, 500ml, 1L 이외 용량 선택 가능
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- 납기일: 3~5주 (평균 납기일: 21일, 2018년 납품 기준)
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| PMMA positive e-beam resist ▼ |
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Features |
Properties |
- Positive e-beam resist.
- Molecular Weights: 950K, 495K, 350K, 120K, 35K.
- Dilution: < 1% up to 18% (depending on molecular weight).
- 판매 용량: 250 ml to 30 L.
- Flexible Distribution: 500 ml 이상 두께 별 250 ml로 선택 가능.
예). 1L 구매 시 아래와 같이 선택 가능.
1. 950K A2: 250ml x 1bottle.
2. 495K A7: 250ml x 1bottle.
3. 120K A10: 500ml x 1bottle. |
| Parameter /PMMA |
A1 to A18 |
Thickness (μm) /
4000 rpm |
50 nm to 2000 nm |
| Resolution value (nm) |
< 10 | |
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Spin Curves |
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PMMA 950K A2, A4, A6, A7, A8 |
PMMA 495K A2, A4, A6, A8, A11 |
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PMMA 495K A15, A16, A17, A18 |
PMMA 350K A2, A4, A6, A8 |
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PMMA 350K A15, A16, A17, A18 |
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| Products Guide ▼ |
Tone | Product (link) | Film Thickness (nm) | Feature | | Adhesion Promoter | SurPass series | NA | Apply resist: Novolac, DNQ, PMMA, HSQ, PMGI, SU-8, SML, PI, ... | | Negative ebeam resist | HSQ series | 8 – 1,650 | Dilution: 1 - 45%.
Supply: Powder, Solution. | | H-SiQ series | 25 – 850 | Dilution: 2 - 20%.
Supply: Powder, Solution. | | AR-N 7520 New series | 100 – 800 | Best resolution: 28 nm.
e-beam, DUV, i-line. | | Positive ebeam resist | HARP PMMA series | 50 – 3,700 | m/W: 950K, 495K.
Dilution: 2 - 11 %. | | HARP-C Copolymer series | 150 – 1,100 | MMA/MAA Copolyer.
Dilution: 6 - 12 %. | | PMMA series | 40 – 7,000 | m/W: 950K, 495K, 350K, 120K, 35K.
Dilution: 1 - 18 %. | | Copolymer series | 100 – 1,100 | Copolymer.
Dilution: 1 - 13 %. | | SML series | 50 – 4,800 | High resolution: 5 nm. Aspect ratio: >50:1.
Slow etch rate. | | Conductive layer | DisCharge H2O series | 25 – 170 | Apply resist: PMMA, HSQ, mr-PosEBR, AR-P 6200, ZEP, SML. | | Protective Surface Coating | PSC-1003 | 2.4 – 5.3 | Protective Surface Coating | | PSC-IB DPM 1010 | 10 (@ 2000 RPM) | Protective Surface Coating |
* Double coating. |
